X-ray and optical characterization of multilayer AlGaAs waveguides

G. Leo, C. Caldarella, G. Masini, A. De Rossi, G. Assanto, O. Durand, M. Calligaro, X. Marcadet, and V. Berger

Appl. Phys. Lett. 77, 3884-3886 (2000)

Abstract:

Effective-index measurements in multilayer AlGaAs waveguides are used in conjunction with X-ray reflectometry to yield - for the first time - refractive indices and thicknesses of the constituent layers, with the accuracy required by parametric interactions in guided-wave and photonic bandgap structures.