A solid-state near infrared spectrum analyzer based on polycrystalline Ge on Si

L. Colace, G. Masini, F. Galluzzi, and G. Assanto

Mat. Sci. Semicon. Proc. 3 , 545-549 (2000)

Abstract:

We report on a novel solid state spectrum analyzer in the near infrared. The device is an array of six photodetectors based on polycrystalline germanium film evaporated on a silicon substrate and each element is a wavelength selective detector. We describe the fabrication and the characterization of such device and we demonstrate its capability both as a wavelength meter for quasi-monochromatic light beams and as a spectrum analyzer.