Waveguide photodetectors for the near infrared in polycristalline germanium on silicon

L. Colace, G. Masini, A. Altieri, and G. Assanto

IEEE Photon. Techn. Lett. 18, 1094-1096 (2006)


We demonstrate novel near-infrared waveguide photodetectors in polycrystalline germanium deposited on silicon-on-insulator at low temperatures. We present the design, fabrication, and characterization of two photodiodes and their comparison. Without optimization, at 1.55 Ám, we measured wall-plug and effective responsivities as high as 30 mA/W and in excess of 150 mA/W, respectively.