A near infrared digital camera in polycrystalline Germanium integrated on Silicon

L. Colace, G. Masini, V. Cencelli, F. DeNotaristefani, and G. Assanto

IEEE J. Quantum Electron. 43, 311-315 (2007)


We report on the first Silicon integrated two-dimensional light-sensitive array equipped with complementary-metal-oxide-semiconductor addressing and readout electronics and operating in the near infrared. The chip includes 64x8 pixels, 64 analog to digital converters, cancellation circuitry for dark current and facilities for test/calibration. We describe its architecture and fabrication, its electronic and optoelectronic characterization as well as its operation as a near infrared camera.