Guided-wave photodetectors in germanium on SOI optical chips
V. Sorianello, M. Balbi, L. Colace, G. Assanto, L. Socci, L. Bolla, G. Mutinati and M. Romagnoli
Physica E 41, 1090-1093 (2009)
Abstract:We report on near-infrared waveguide photodetectors realized in germanium evaporated at low temperature on silicon-on-insulator chips. We discuss the fabrication and integration and show experimental results in terms of dark current, responsivity and signal to noise ratio.